PVD Coater (HIPIMs):
• 1 rotary table, with a 6-position planetary system with two rotation axes. Each planetary position has a useful diameter of 100mm and an effective height of 200mm. The useful diameter of each table is 100mm.
• The chamber is equipped with a Speedflo device, an advanced reactive feedback control system that offers improvements in deposition rates, coating properties and process reliability.
The system has a total of 4 magnetrons (200x100 mm), 2 of them DC-pulsed and 2 bipolar BHíPIMS, with their corresponding power supplies.
• The 4 magnetrons (rectangular Gencoa) are unbalanced type II and reach the necessary transverse field value of up to 450G.
• The 2 HIPIMS magnetrons are Bipolar, with positive pulses of up to +400 V, powered by HiPV HiPLus sources of 6kW power.
• The 2 pulsed DC magnetrons work with AE Pinnacle Plus sources.
• The system has an additional source for the polarization system of the rotating support that reaches -1200V DC and frequencies of up to 350 kHz, which will allow etching and PECVD processes.
• The chamber also has an internal heating system using resistors to develop coating processes up to 500ºC, powered by its corresponding source.
• The chamber is equipped with a Speedflo device, an advanced reactive feedback control system that offers improvements in deposition rates, coating properties and process reliability.