AFM scan head in tripod stand-alone,tip-scanning AFM architecture with 100 μm range XY flexure guided scanner and decoupled Z-actuator
• No laser alignment due to alignment structure on cantilever chip and high precision of cantilever holder
• Low coherence 650 nm laser, four-quadrant split photodiode
• Sample size: unlimited without sample stage, 100 mm on sample stage
• Automatic approach: 2 mm
• Optical view: dual view system (top/side view)
• Operation in air and liquid
• Maximum sample height: 30 mm, including height extensions
• Scan range XYZ: 100 μm x 100 μm x 10 μm
Z-sensor
• Sealing membrane to reduce the risk of liquid spill into the scan head
• Operation together with C3000/C3000i controller:
• XY Drive resolution: 6 pm
• Z Drive resolution: 0.6 pm
• Z measurement noise level: typ. 35 pm max. 50 pm (RMS, dynamic mode in air) in
appropriate environment
• XY-linearity mean error: < 0.1%
• XY-flatness at maximum scan range: typ. 5 nm
• Detector bandwidth: DC - 4 MHz
• Detector noise level: typ. 60 pm / max. 100 pm
• Z-sensor noise level (RMS): typ. 180 pm / max. 200 pm
• Floor vibration requirements: VC-D, ideally VC-E or better
• Environmental acoustic requirements: <65dB (when used with AE350)